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Accelovant

SOLUTIONS | SEMICONDUCTOR

Wafer / semiconductor chip macro pattern — Kristonium sensor application

Stop choosing between Performance and price

Fiber-optic sensing for what’s next: repeatable, modular, standardized, and cost-cutting. Easy Choice!

Lower Measurement Uncertainty or Lower Cost. Why Choose?

Kristonium® sensors deliver unmatched temperature repeatability, stability, and full range accuracy. Modular design blocks assure that even custom sensor solutions are optimized for your cost savings.

Semiconductor wafer-processing cluster tool with multiple vacuum chambers

Why Semi equipment OEMs Trust Kristonium®

Unmatched Accuracy

+/-0.10°C Full range, even at -95°C, Uncalibrated

EMI/RFI/HV Immune

Immune to RF, EM, High Voltage, and non-magnetic

Modular, Cost Engineered

Lego-like one-size-fits-all Interchangeable parts & common modules allows cost efficiencies

We do it your way

Our best thinking can help advance your best thinking. Let us show you how.

Not just better, but Proven Better:

Don’t take our word for it, prove it to yourself. In every side-by-side comparison with incumbent suppliers, Accelovant prevailed.

“If Accelovant says they can do it, based on my testing, they have under-committed and over-delivered”

Process Integration Lead, Top 3 OEM

Robotic arm probing a semiconductor wafer on a test stage in a cleanroom

Faster, Better, Smarter Means Higher Yields

Kristonium® smart sensors cut process variability, tighten control, lower measurement uncertainty, improve chamber matching, and minimize drift.

Faster computational speeds

Every smart sensor is an edge computer, 100Hz sampling without averaging, 0.001°C Resolution. Control at 1kHz.

Hard to believe repeatability

Your most important parameter is our strength. Kristonium sensors have industry leading measurement repeatability.

The widest measurement range

Smart sensors that are qualified for -95°C up to 700°C – truly a computational and material science marvel.

Fault Tolerant

Each sensor has dynamic fault monitoring and key component fail-over redundancy - and that design discipline is part of our reliability track-record.

Specification Snapshot


Temperature Range

-95°C to 700°C

Absolute Accuracy (Interchangeable)*

±0.10°C or ±0.50°C. Accuracy stated for full measurement range with specified optical cables

Immunity

RFI, EMI, Voltage up to 38kV, Magnetic, free-radical resistant. Vacuum rated.

Speed

100Hz sample, User adjustable


Number of measurement channels (probes per electronics)

1 to 24 Probes per MPX, Modular, Configurable, Upgradable, Hot-Swappable

Price USD

Prices start at $299 per system (probe, cable, electronics)

Communication protocols

Supports all standard SEMI communication protocols — Isolated RS-485, Isolated 4-20mA, EtherCAT SEMI ETG 5003.2061

Modularity

Modular one size fits all design philosophy. Avoid requalification, get only what you need


*Any probe and any converter can achieve the specified performance

Semiconductor Manufacturers: ask your tool OEM for Accelovant

“Accelovant is exceptionally easy to work with, adaptable to our fast-moving design cycles, and typically respond to inquiries within just a few hours.”

Process Integration Lead, Top 3 OEM

Accelovant fiber-optic temperature sensor product

Ready to let us help you get ahead?

Give us your build parameters, and we’ll show you our unbeatable price-performance